阳极氧化法制备多孔氧化物模板及其应用

发布时间：2018-02-21 09:54

本文关键词： 多孔阳极氧化物模板石英基片银光电学性质　出处：《福建师范大学》2010年硕士论文　论文类型：学位论文

【摘要】：多孔氧化物薄膜因其有序的纳米级孔洞结构使之成为合成纳米材料的常用模板,氧化物模板的制备和应用在纳米时代成为人们关注的热点。因而,开展多孔氧化物模板的制备及其特性的研究具有十分重要的现实意义。本论文针对石英基片上多孔氧化物模板的制备、模板性能及其应用等方面展开研究,具体内容有： (1)直流磁控溅射沉积钛膜进行不同时间的阳极氧化,获得多孔阳极氧化钛(PATO)薄膜。结果表明,制得的氧化钛薄膜是多晶的Ti10O18；氧化时间影响样品的孔洞结构和样品的光学性质。氧化时间为120 min的PATO薄膜在可见光区的折射率小于2.0,孔隙率约为0.32：粗糙的表面和内部的孔洞结构使其消光系数大于0.1。 (2)石英基片上蒸发镀金属铝膜后对其阳极氧化,探讨氧化时间以及扩孔除铝处理对多孔氧化铝(AAO)光学性质的影响。在石英基片上双面镀铝后阳极氧化,制备高透射率的双面氧化铝薄膜。结果表明,增加氧化时间和扩孔除铝处理使薄膜透射率逐渐增大,使AAO薄膜对石英基片起增透作用。石英基片上双面AAO薄膜腐蚀15min后在整个可见光波长范围有很高的透射率(最高透过率超过99%)。 (3)以石英基片上多孔氧化铝薄膜为基底溅射沉积不同厚度的银薄膜(AAOAg),研究Ag薄膜的厚度对AAOAg薄膜的结构形貌和光电学性质的影响,并与在石英基片上沉积的银薄膜(QuartzAg)性质进行比较。结果表明,AAOAg薄膜的成膜过程经历由颗粒膜转化为网状膜,最后形成连续膜,形成连续薄膜时间长；形成连续薄膜前AAOAg的光电学性质与QuartzAg有很大差别,而形成连续薄膜后的AAOAg与QuartzAg薄膜的光电学性质大致相同。
[Abstract]:Porous oxide films have become a common template for the synthesis of nanomaterials because of their ordered pore structure. The preparation and application of oxide templates have become the focus of attention in the nanometer era. It is of great practical significance to study the preparation and characteristics of porous oxide templates. In this paper, the preparation, properties and applications of porous oxide templates on quartz substrates are studied. 1) the porous anodic titanium oxide (PATO) films were obtained by anodic oxidation of titanium films deposited by DC magnetron sputtering. The prepared titanium oxide thin films are polycrystalline Ti10O18.The oxidation time affects the pore structure of the samples and the optical properties of the samples. The refractive index of the PATO films with the oxidation time of 120 min is less than 2.0 in the visible region, and the porosity is about 0.32: rough surface. The internal pore structure makes the extinction coefficient greater than 0.1. (2) the anodizing of quartz substrate by evaporation of aluminum film, the effect of oxidation time and the treatment of reaming and removing aluminum on the optical properties of porous alumina (AAO) were discussed. The anodic oxidation of aluminum on both sides of quartz substrate was studied. The results show that the transmittance of the films increases gradually with the increase of oxidation time and the treatment of removing aluminum from holes. After 15 minutes corrosion, the AAO film has a high transmittance over the whole visible wavelength range (the highest transmittance is more than 99g). Silver thin films with different thickness were deposited by sputtering on the substrate of porous alumina film on quartz substrate. The influence of Ag film thickness on the structure, morphology and photoelectric properties of AAOAg thin films was studied. The results show that the film formation process of AAOAg film changes from granular film to reticular film, and finally forms a continuous film, forming a continuous film for a long time. The optoelectronic properties of AAOAg before the formation of continuous films are quite different from those of QuartzAg, while the photovoltaic properties of AAOAg and QuartzAg films after the formation of continuous films are approximately the same.
【学位授予单位】：福建师范大学
【学位级别】：硕士
【学位授予年份】：2010
【分类号】：TB383.2

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