溶胶—凝胶法制备掺铝氧化锌靶材研究

发布时间：2018-03-23 22:13

  本文选题：AZO靶材　切入点：溶胶-凝胶法　出处：《西华大学》2011年硕士论文

【摘要】：AZO(掺铝氧化锌,Al-ZnO)靶材质量是影响溅射法制备薄膜的关键因素之一。AZO靶材主要制备工艺有常压烧结、热等静压烧结及真空烧结等。热等静压烧结、真空烧结两种工艺制备出的靶材性能较好,但靶材形状及尺寸受限且工艺复杂、生产成本高、效率低。采用溶胶-凝胶工艺有利于得到成分均匀、颗粒形态和粒径等可控的掺铝氧化锌复合粉体,并可采用无机盐作为原料以降低成本,因此有较高的推广应用价值。 本文采用溶胶-凝胶法合成了掺铝氧化锌复合粉体,用常压烧结制备出电阻率较低、致密度较高的AZO靶材。研究了络合剂种类及用量、反应温度、pH值、干燥温度等因素对粉体形态及靶材性能的影响,分析了球磨及烧结制度对靶材微观组织的作用,与固相反应法制备的靶材进行了对比。结果表明,控制溶胶-凝胶的制备工艺参数可以得到烧结性能良好的粉体,湿法球磨能减少粉体团聚,提高靶材密度;随成型压力提高靶材致密度先升后降,电阻率变化则相反;增加烧结保温时间,晶粒尺寸变大,致密度提高缓慢,电阻率变化较小;采用2MPa成型压力,在1250℃烧结1h,可以得到致密度达99.2 %,电阻率约2×10~(-2)Ω·cm的靶材。
[Abstract]:The quality of AZO (aluminum-doped zinc oxide Al-ZnO) target is one of the key factors affecting the preparation of thin films by sputtering. The main preparation processes of AZO target are normal pressure sintering, hot isostatic pressure sintering and vacuum sintering. The targets prepared by vacuum sintering process have good properties, but the shape and size of the targets are limited, the process is complex, the production cost is high, and the efficiency is low. The aluminum doped zinc oxide composite powder with controllable particle shape and particle size can be used as raw material to reduce the cost, so it has a high value of popularization and application. In this paper, Al-doped zinc oxide composite powders were synthesized by sol-gel method. AZO targets with low resistivity and high density were prepared by normal pressure sintering. The kinds and dosage of complex agents, reaction temperature and pH value were studied. The effects of drying temperature and other factors on the morphology and properties of the targets were analyzed. The effects of ball milling and sintering on the microstructure of the targets were analyzed and compared with the targets prepared by solid state reaction. The powder with good sintering performance can be obtained by controlling the preparation process parameters of sol-gel. Wet ball milling can reduce the agglomeration of the powder and increase the density of the target, and the density of the target increases first and then decreases with the increase of molding pressure, but the change of resistivity is opposite. When the sintering time is increased, the grain size becomes larger, the density increases slowly, and the resistivity change is small. The target with density of 99.2 and resistivity of about 2 脳 10 ~ (-2) 惟 cm can be obtained by sintering at 1250 鈩，

本文编号：1655421