PZT薄膜的溶胶凝胶法制备及在MEMS中的应用研究

发布时间：2018-05-13 14:17

本文选题：PZT薄膜 + 溶胶凝胶法　；参考：《上海交通大学》2011年硕士论文

【摘要】：采用PZT压电陶瓷制备的压电悬臂梁,是制备振动能量采集器的关键元件。本文详细介绍了压电悬臂梁的制备步骤,并着重探讨了其中最为关键的PZT铁电薄膜制备以及器件流片工艺。本文通过Sol-Gel法,采用全国产试剂制备PZT铁电薄膜。利用单因素变量法分别研究了浓度、pH值、温度对前驱体溶胶的影响以及热处理和退火工艺对薄膜形态的影响,并最终确定工艺方案。在Pt/Ti/SiO2/Si基片上制备出厚度为2μm的PZT铁电薄膜。采用SEM对薄膜的表面和截面形态进行了表征,发现薄膜晶粒饱满、结构致密,与基底结合力好。通过XRD分析了基片和退火制度对薄膜晶体结构的影响,发现Pt/Ti基底有利于提高晶向一致性并促进钙钛矿结构的形成,退火温度的升高和退火时间的增加有利于(111)晶向的生长。电学性能方面,利用TR66A铁电测试仪测试了薄膜的电滞回线,发现(111)择优取向的晶体的铁电性能较为理想。制备出样品的剩余极化Pr为19.94μC/cm2,矫顽场Ec为11.60 kV/cm。利用湿法化学蚀刻、RIE干法蚀刻、UV-LIGA等流片工艺,将上述PZT薄膜制备成压电悬臂梁。通过设计梯形悬臂梁增加发电效率,并通过在悬臂梁尖端放置Ni质量块来降低谐振频率,最终制备的压电悬臂梁长×底宽×尖宽为2000μm×750μm×500μm,在频率为155Hz/1g加速度激励下,开路电极间输出电压峰峰值Vp-p达984 mV。此外,本文还制备了一个防水的悬臂梁能量采集器模型并进行了实际应用研究,证明其可以在液体环境下由超声波驱动发电。
[Abstract]:Piezoelectric cantilever beam fabricated by PZT piezoelectric ceramics is the key component of vibration energy collector. In this paper, the fabrication of piezoelectric cantilever beam is introduced in detail, and the preparation of PZT ferroelectric thin film and the flow sheet process are discussed. In this paper, PZT ferroelectric thin films were prepared by Sol-Gel method. The effects of pH and temperature on the precursor sol and the effects of heat treatment and annealing on the film morphology were studied by single factor variable method. PZT ferroelectric thin films with thickness of 2 渭 m were prepared on Pt/Ti/SiO2/Si substrates. The surface and cross section morphology of the films were characterized by SEM. It was found that the films had full grain size, dense structure and good adhesion to the substrate. The effect of substrate and annealing on the crystal structure of the thin films was analyzed by XRD. It was found that the Pt/Ti substrate was beneficial to the formation of perovskite structure and the increase of annealing temperature and annealing time was beneficial to the growth of the crystal orientation of the thin films. In terms of electrical properties, the hysteresis loops of the films were measured by TR66A ferroelectric tester. It was found that the ferroelectric properties of the crystal with preferred orientation were ideal. The residual polarization pr is 19.94 渭 C / cm ~ 2 and the coercive field E _ c is 11.60 kV / cm ~ (-1). The piezoelectric cantilever beam was prepared by wet chemical etching and dry etching of PZT thin films with UV-LIGA isoflakes. By designing trapezoidal cantilever beam to increase generation efficiency, and by placing Ni mass block at the tip of cantilever beam to reduce resonant frequency, the length 脳 base width 脳 tip width of piezoelectric cantilever beam is 2000 渭 m 脳 750 渭 m 脳 500 渭 m, which is excited by 155Hz/1g acceleration. The peak output voltage peak value (Vp-p) between open circuit electrodes is 984 MV. In addition, a waterproof cantilever beam energy collector model is prepared and its practical application is studied. It is proved that the model can be driven by ultrasonic in liquid environment.
【学位授予单位】：上海交通大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：TQ174.1

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