丝网印刷法制备热释电厚膜

发布时间：2018-05-26 06:18

  本文选题：丝网印刷 + 厚膜　； 参考：《电子科技大学》2010年硕士论文

【摘要】： 锆钛酸铅(PbZrTiO3,简称PZT)材料具有优异的铁电、压电、热释电性能,被广泛用于制造各种传感器、换能器与驱动器。为了满足大功率激光器和灵巧弹药等对红外探测器频率响应高、敏感元面积大的使用要求,本论文开展了PZT厚膜材料和单元红外探测器的研究。 在PZT厚膜材料研究方面:为提高厚膜的印刷质量,对丝网印刷浆料的有机载体配方、粉体载体比例、球磨工序等工艺进行了研究,制备出了具备良好稳定性、均匀性与流变特性的厚膜浆料。通过对厚膜形貌、微观结构、介电与热释电性能的分析与测试,优化了厚膜的烧结与极化工艺。在最优工艺条件下制备的厚膜为单一的钙钛矿结构,居里温度425℃,常温1kHz下的相对介电常数与损耗角正切分别为85.46与0.01584,热释电系数为9.14×10~(-9)C/cm~2·K。 研究了厚膜在烧结过程中的致密化问题,分析了“骨架结构”对厚膜致密度的影响,提出并验证了一定程度的孔隙率对材料红外探测性能的提高具有积极作用。 在PZT厚膜红外探测器方面:初步研究了激光刻蚀制作热释电单元探测器的工艺。探测器面积5×5mm~2,在黑体温度500K、斩波器频率8.5Hz~2217Hz的范围内,测量了器件的电压响应与噪声,计算出探测率为3.4×10~7~1.7×10~8 cmHz~(1/2)W~(-1),工作带宽为1.2kHz,性能优良,可满足应用要求。
[Abstract]:Lead zirconate titanate PbZrTiO3 (PZT3) has excellent ferroelectric, piezoelectric and pyroelectric properties, and has been widely used in the manufacture of various sensors, transducers and actuators. In order to meet the requirements of high power laser and smart ammunition for high frequency response of infrared detector and large area of sensitive element, the research of PZT thick film material and unit infrared detector has been carried out in this paper. In the aspect of PZT thick film material research: in order to improve the printing quality of thick film, the organic carrier formula, powder carrier ratio and ball milling process of screen printing paste were studied, and good stability was obtained. Homogeneity and rheological properties of thick film slurry. The sintering and polarization process of thick film was optimized by analyzing and testing the morphology, microstructure, dielectric and pyroelectric properties of thick film. Under the optimum conditions, the thick film is of a single perovskite structure, Curie temperature is 425 鈩，

本文编号：1936254