电化学法制备FePt薄膜

发布时间：2018-06-22 22:27

  本文选题：L10相FePt + 电沉积　； 参考：《兰州理工大学》2011年硕士论文

【摘要】：本文利用脉冲电沉积法,以FeSO_4·7H_2O和H_2PtCl_6·6H_2O作为Fe~(2+)源和Pt~(4+)源,无水N_a2SO_4为导电盐,溶剂为二次去离子水,分别制备出了FePt共沉积薄膜和Fe/Pt多层膜。利用x射线衍射仪(XRD)、扫描电子显微镜(SEM)、能谱(EDX)和振动样品磁强计(VSM)对热处理前后的FePt共沉积薄膜和Fe/Pt多层膜微观形貌和磁性能进行了表征。主要研究内容如下: (1)以纯Cu片为基体,在沉积电位在-1V到-6V之间变化的情况下,制备出了FePt共沉积薄膜。电位变的越负,共沉积薄膜中Fe的含量增加,同时Pt的含量相对减少,在-4.7V时制备出了Fe/Pt原子比接近于1:1的共沉积薄膜,而且,从薄膜的表面形貌可知,薄膜的表面颗粒大小与沉积电位有关。-4.7V时的共沉积薄膜表面颗粒较为均匀致密,薄膜表面平整,但薄膜中的O含量也达到最大值,而富Fe的薄膜与富Pt的薄膜中的O含量都很少。将沉积电位-4.7V的FePt共沉积薄膜在550℃氢气气氛中热处理30分钟后,VSM测试结果表明,矫顽力从2.19kA/m增加到了12.5kA/m,饱和磁化强度由408.6kA/m增大到465.3kA/m。 (2)由制备FePt共沉积薄膜的结果可知,富Fe层沉积电位选择-4V,-5V,-6V,富Pt层沉积电位选择-2V,-3V,-4V,然后使富Fe层和富Pt层交替沉积制备出Fe/Pt多层膜。本文研究了沉积电位,沉积时间,沉积基体等Fe/Pt多层膜制备中的影响因素。结果表明:在固定富Pt层沉积电位,只变换富Fe层沉积电位或固定富Fe层沉积电位,只变换富Pt层沉积电位时,由于电流密度的不同,薄膜的表面形貌都有较明显的差别。组分上显示出一定的规律性,对组分较理想的Fe/Pt多层膜在550°C纯氢气气氛中热处理30min,发现薄膜中的O被还原,主要成分Fe和Pt的含量都有不同程度的增加,表面颗粒长大,矫顽力与饱和磁化强度都大幅提高。 固定沉积电位,SEM断层显示Fe/Pt多层膜(t-2V=12min,t-6V=8min,循环2周期)有清晰的层状结构,对比其他沉积时间所得的薄膜,该Fe/Pt多层膜表面颗粒较细小,表面致密。以导电玻璃与纯Cu片做基体的对比中看出,薄膜在导电玻璃上的附着力较差,薄膜不致密。
[Abstract]:In this paper, FePt co-deposited thin films and Fe- / Pt multilayers were prepared by using FeSOS _ 47H _ 2O and H _ 2PtCl _ 6H _ 2O as Fe2 and Pt4 sources, anhydrous Na-2SO4 as conducting salt and solvent as secondary deionized water, respectively. X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (edX) and vibrating sample magnetometer (VSM) were used to characterize the microstructure and magnetic properties of FePt co-deposited films and Fe / Pt multilayers before and after heat treatment. The main contents are as follows: (1) FePt co-deposited thin films were prepared by using pure Cu as substrate and the deposition potential varied from -1V to -6V. The more negative the potential, the higher the Fe content in co-deposited films, and the lower the Pt content. At -4.7 V, the co-deposited films with Fe / Pt atomic ratio approaching 1:1 were prepared, and the surface morphology of the films was shown. The surface particle size of the films is related to the deposition potential. The surface particles of the codeposited films are uniform and compact, but the O content in the films is also the maximum. However, Fe rich thin films and Pt rich thin films have very little O content. The results of VSM measurements of FePt codeposited films with a deposition potential of -4.7V in 550 鈩，

本文编号：2054454