烧结温度对放电等离子烧结法制备IGZO靶材的影响研究
发布时间：2018-11-22 07:31
【摘要】：以预烧结复合粉体为原料,采用放电等离子烧结(SPS)方法制备IGZO靶材,并采用密度测定、XRD、SEM等手段对不同烧结温度条件下的靶材结构性能进行了表征分析。结果表明,在一定的烧结温度区间,随烧结温度升高,烧结体相对密度增加,体积电阻率降低,烧结温度1 100℃条件下烧结体的结构性能较好,相对密度97.44%,体积电阻率3.66 mΩ/cm~3。
[Abstract]:Presintered composite powder was used as raw material to prepare IGZO target by spark plasma sintering (SPS) (SPS) method. The structure and properties of the target at different sintering temperature were characterized by density measurement and XRD,SEM. The results show that with the increase of sintering temperature, the relative density of the sintered body increases, the volume resistivity decreases, and the sintering temperature at 1 100 鈩，
本文编号：2348511
[Abstract]:Presintered composite powder was used as raw material to prepare IGZO target by spark plasma sintering (SPS) (SPS) method. The structure and properties of the target at different sintering temperature were characterized by density measurement and XRD,SEM. The results show that with the increase of sintering temperature, the relative density of the sintered body increases, the volume resistivity decreases, and the sintering temperature at 1 100 鈩，
本文编号：2348511
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