溶胶—凝胶法制备PZT薄膜的研究

发布时间：2019-02-09 19:50

【摘要】：锆钛酸铅(PZT)薄膜材料因其具有良好的热释电、压电、铁电及光电等特性,在微电子学、光电子技术和微电子机械系统等高科技领域有着广阔的应用前景,已经受到人们广泛关注和重视。本文采用溶胶-凝胶法制备均匀致密的锆钛酸铅(PZT)薄膜,研究了在制备锆钛酸铅薄膜过程中溶胶浓度、pH值、水含量及添加剂含量等主要工艺参数对PZT薄膜结构和表面形貌的影响。本文在制备PZT薄膜的研究中,首先,为制备出均匀致密的薄膜,尽量使得基片的晶格常数与PZT薄膜材料的晶格常数相匹配,本文选择了三种不同的基片,分别是A1203陶瓷基片、石英玻璃基片和单晶硅Si基片,对比这三种基片上薄膜,选择一种最佳的基片作为薄膜的衬底。其次,锆钛摩尔比选择的是65/35,与52/48相比较,65/35在热释电、压电等性能上均优于52/48,通过从65/35的研究来提高和改善PZT的结构和性能。最后,采用无机硝酸锆作为锆源,改善采用有机锆源工艺复杂、价格昂贵和实验设备要求高等问题。
[Abstract]:Lead zirconate titanate (PZT) thin films have been widely used in the fields of microelectronics, optoelectronics and microelectromechanical systems because of their excellent pyroelectric, piezoelectric, ferroelectric and optoelectronic properties. Has been widely concerned about and attention. In this paper, uniform and dense lead zirconate titanate (PZT) thin films were prepared by sol-gel method. The sol concentration and pH value in the preparation of lead zirconate titanate films were studied. The effects of water content and additive content on the structure and surface morphology of PZT films were investigated. In this paper, in order to prepare uniform and compact PZT thin films, we choose three different substrates, namely A1203 ceramic substrates, to match the lattice constants of PZT thin films. Quartz glass substrates and monocrystalline silicon Si substrates were compared. Secondly, the molar ratio of zirconium to titanium is 65 / 35. Compared with 52 / 48, 65 / 35 is superior to 52 / 48 in pyroelectric and piezoelectric properties. The structure and properties of PZT are improved by studying from 65 / 35. Finally, using inorganic zirconium nitrate as zirconium source, the process of using organic zirconium source is complicated, expensive and the requirement of experimental equipment is high.
【学位授予单位】：长春理工大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：TB383.2

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