化学镀法制备软磁薄膜材料及激光刻蚀诱导面内各向异性的研究
发布时间：2019-06-26 17:38
【摘要】：Ni基和Co基合金是常用的软磁薄膜,被广泛应用于无线电领域、传感器和磁记录头等。其中,Ni基合金的特点是具有高的起始磁导率和低的矫顽力；而Co基合金的特点是具有高的饱和磁化强度,高的各向异性常数、高居里温度和高电阻率。纯的金属合金材料,如：FeNi、FeCo等合金在空气中容易氧化不易保持它们的磁性能,所以在工业中的应用受到限制。而在合金材料中掺入一些非金属元素,如：B、P等元素不仅可以提高薄膜的抗氧化性,而且可以细化晶粒,提高薄膜的软磁性能。 常用的制备软磁薄膜的方法有很多,比如物理气相沉积、电化学沉积和化学镀等,其中化学镀方法的优点在于对衬底的要求低、沉积薄膜的附着力和平整度较好、工艺成本低,所以适合大规模的工业化生产。本论文中,我们利用化学镀的方法成功制备了软磁性能优良的Ni-P合金、Ni-Co-P合金和Ni-Co-Fe-P合金,并尝试用激光诱导薄膜的面内各向异性。我们用X射线衍射、扫描电子显微镜、原子力显微镜、振动样品磁强计等手段对样品的结构、形貌和磁性进行了研究,考察了施镀时间、还原剂浓度、金属离子比对样品的结构、形貌和磁性的影响。本文的主要工作有以下几个方面： (1)系统地研究了施镀时间、还原剂浓度对Ni-P薄膜晶体结构、薄膜成分、静态磁性的影响；研究了镀液中金属离子比例对Ni-Co-P薄膜的晶体结构、薄膜成分和静态磁性的影响；同时,尝试制备了Ni-Co-Fe-P薄膜。 (2)研究了快速真空磁场热处理对Ni-P薄膜的晶体结构和磁性能的影响。(3)用激光刻线的方法在Ni-P薄膜和Ni-Co-P薄膜内成功诱导出了面内各向异性场,获得了双各向异性薄膜。最后研究了激光参数对Ni-Co-P薄膜面内各向异性场的影响,得到了在较大范围内有效调控软磁薄膜面内各向异性场的方法。
[Abstract]:Ni-based and Co-based alloys are commonly used in soft magnetic thin films, which are widely used in radio fields, sensors and magnetic recording heads. Among them, Ni based alloy is characterized by high initial permeability and low coercive force, while Co based alloy is characterized by high saturation magnetization, high anisotropy constant, high Curie temperature and high resistance. Pure metal alloy materials, such as FeNi,FeCo, are easy to oxidize and not easy to maintain their magnetic properties in air, so their application in industry is limited. The addition of some non-metallic elements, such as B, P and other elements, can not only improve the oxidation resistance of the films, but also refine the grains and improve the soft magnetic properties of the films. There are many commonly used methods to prepare soft magnetic thin films, such as physical vapor deposition, electrochemical deposition and Electroless plating, among which the advantages of Electroless plating are that the substrate requirements are low, the adhesion and smoothness of the deposited films are good, and the process cost is low, so it is suitable for large-scale industrial production. In this paper, Ni-P alloy, Ni-Co-P alloy and Ni-Co-Fe-P alloy with excellent soft magnetic properties were successfully prepared by chemical plating, and the in-plane anisotropy of the film was induced by laser. The structure, morphology and magnetism of the samples were studied by means of X-ray diffraction, scanning electron microscope, atomic force microscope and vibrating sample magnetometer. The effects of plating time, reductant concentration and metal ion ratio on the structure, morphology and magnetism of the samples were investigated. The main work of this paper is as follows: (1) the effects of plating time and reductant concentration on the crystal structure, film composition and static magnetic properties of Ni-P thin films were studied systematically; the effects of metal ion ratio in plating solution on the crystal structure, film composition and static magnetic properties of Ni-Co-P thin films were studied; at the same time, Ni-Co-Fe-P thin films were prepared. (2) the effect of rapid vacuum magnetic field heat treatment on the crystal structure and magnetic properties of Ni-P thin films was studied. (3) the in-plane anisotropy field was successfully induced in Ni-P thin films and Ni-Co-P thin films by laser lithography, and the bianisotropy thin films were obtained. Finally, the effect of laser parameters on the in-plane anisotropy field of Ni-Co-P thin films is studied, and the method of effectively regulating the in-plane anisotropy field of soft magnetic thin films in a wide range is obtained.
【学位授予单位】：兰州大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：O484.43
本文编号：2506355
[Abstract]:Ni-based and Co-based alloys are commonly used in soft magnetic thin films, which are widely used in radio fields, sensors and magnetic recording heads. Among them, Ni based alloy is characterized by high initial permeability and low coercive force, while Co based alloy is characterized by high saturation magnetization, high anisotropy constant, high Curie temperature and high resistance. Pure metal alloy materials, such as FeNi,FeCo, are easy to oxidize and not easy to maintain their magnetic properties in air, so their application in industry is limited. The addition of some non-metallic elements, such as B, P and other elements, can not only improve the oxidation resistance of the films, but also refine the grains and improve the soft magnetic properties of the films. There are many commonly used methods to prepare soft magnetic thin films, such as physical vapor deposition, electrochemical deposition and Electroless plating, among which the advantages of Electroless plating are that the substrate requirements are low, the adhesion and smoothness of the deposited films are good, and the process cost is low, so it is suitable for large-scale industrial production. In this paper, Ni-P alloy, Ni-Co-P alloy and Ni-Co-Fe-P alloy with excellent soft magnetic properties were successfully prepared by chemical plating, and the in-plane anisotropy of the film was induced by laser. The structure, morphology and magnetism of the samples were studied by means of X-ray diffraction, scanning electron microscope, atomic force microscope and vibrating sample magnetometer. The effects of plating time, reductant concentration and metal ion ratio on the structure, morphology and magnetism of the samples were investigated. The main work of this paper is as follows: (1) the effects of plating time and reductant concentration on the crystal structure, film composition and static magnetic properties of Ni-P thin films were studied systematically; the effects of metal ion ratio in plating solution on the crystal structure, film composition and static magnetic properties of Ni-Co-P thin films were studied; at the same time, Ni-Co-Fe-P thin films were prepared. (2) the effect of rapid vacuum magnetic field heat treatment on the crystal structure and magnetic properties of Ni-P thin films was studied. (3) the in-plane anisotropy field was successfully induced in Ni-P thin films and Ni-Co-P thin films by laser lithography, and the bianisotropy thin films were obtained. Finally, the effect of laser parameters on the in-plane anisotropy field of Ni-Co-P thin films is studied, and the method of effectively regulating the in-plane anisotropy field of soft magnetic thin films in a wide range is obtained.
【学位授予单位】：兰州大学
【学位级别】：硕士
【学位授予年份】：2011
【分类号】：O484.43
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