Sol-gel法制备稀土掺杂ZAO薄膜的红外发射率及光致发光特性研究

发布时间：2018-06-21 05:31

  本文选题：ZAO + 溶胶凝胶方法　； 参考：《南京航空航天大学》2011年硕士论文

【摘要】：利用溶胶凝胶法,在石英玻璃的基底上沉积了镧系稀土元素和Al共掺的ZnO薄膜,利用了XRD衍射和SEM分别研究了薄膜的结构和表面形貌。在不同Er掺杂浓度和退火温度下研究了ZAOEr薄膜在8~14μm的红外发射率和光学性质。 ZAOEr薄膜具有六方纤锌矿的结构,并且沿(002)晶向择优生长,可见光范围内的透光率在85%以上。薄膜的禁带宽度会随着Er含量的增加而出现红移。当激发波长为290nm时,可观察到一个紫光发射和蓝光发射。当激发波长为370nm,可观察到一个强烈的绿光发射。CL谱中305nm处出现的紫外峰与Er~(3+)的掺杂有关。大体上,随着热处理温度的升高,ZAOEr薄膜的红外发射率呈下降趋势,并且在退火温度为900℃,Er掺杂浓度为2 at.%时其红外发射率最小,为0.749。 研究了不同稀土元素(Y~(3+)、La~(3+)、Ce~(3+)、Pr~(3+)、Nd~(3+)、Sm~(3+)、Eu~(3+)、Gd~(3+)、Tb~(3+)、Dy~(3+)、Ho~(3+)、Er~(3+)、Yb~(3+)和Lu~(3+))掺杂的ZAOR薄膜的红外发射率和光学性质,ZAOR薄膜在可见光的透光率在85%以上,和ZAO薄膜相比,随着稀土元素的掺入,禁带宽度出现了减小,当激发波长为370nm时,可观察到强烈的绿光发射峰,其中ZAOGd薄膜的绿光发射峰强度最强。ZAONd薄膜具有最小的红外发射率0.753。阴极荧光谱中310nm左右出现的紫外峰与稀土离子的掺杂有关。 研究了不同转速条件下ZnO,ZAO和ZAOEr显微形貌的影响,探讨了不同转速对薄膜透光性能和光致发光性能的影响,转速在2000rpm时的(002)峰的强度要高于其他转速条件。同时纯ZnO薄膜的C轴择优取向性要强于掺杂后的薄膜。随着转速的升高,薄膜致密性下降,孔隙增多。ZnO薄膜近带边发射峰随着Al~(3+)和Er~(3+)的掺入,强度下降,深能级发射峰则进一步增强,随着转速的降低,深能级发射峰的强度逐渐升高。
[Abstract]:Lanthanide rare earth elements and Al co-doped ZnO thin films were deposited on quartz glass substrates by sol-gel method. The structure and surface morphology of the films were investigated by XRD and SEM, respectively. The infrared emissivity and optical properties of ZAOEr thin films at 814 渭 m have been studied at different er doping concentrations and annealing temperatures. ZAOEr thin films have hexagonal wurtzite structure and preferential growth along the crystal direction. The transmittance of visible light is more than 85%. The band gap of the film will shift red with the increase of er content. When the excitation wavelength is 290nm, a purple emission and blue emission can be observed. When the excitation wavelength is 370 nm, it is observed that the UV peak at 305nm in the green emission. CL spectrum is related to the doping of Ernion 3). In general, the infrared emissivity of ZAOEr thin films decreases with the increase of heat treatment temperature, and the infrared emissivity is 0.749 when the annealing temperature is 900 鈩，

本文编号：2047435